JPS6339977Y2 - - Google Patents
Info
- Publication number
- JPS6339977Y2 JPS6339977Y2 JP17099183U JP17099183U JPS6339977Y2 JP S6339977 Y2 JPS6339977 Y2 JP S6339977Y2 JP 17099183 U JP17099183 U JP 17099183U JP 17099183 U JP17099183 U JP 17099183U JP S6339977 Y2 JPS6339977 Y2 JP S6339977Y2
- Authority
- JP
- Japan
- Prior art keywords
- resistor
- layer
- substrate
- insulating layer
- connection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 18
- 239000004065 semiconductor Substances 0.000 claims description 18
- 239000000758 substrate Substances 0.000 claims description 18
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical group [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 2
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- 238000001259 photo etching Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical group [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
Landscapes
- Electrodes Of Semiconductors (AREA)
- Semiconductor Integrated Circuits (AREA)
- Bipolar Integrated Circuits (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17099183U JPS6079755U (ja) | 1983-11-04 | 1983-11-04 | 抵抗を有する半導体装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP17099183U JPS6079755U (ja) | 1983-11-04 | 1983-11-04 | 抵抗を有する半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6079755U JPS6079755U (ja) | 1985-06-03 |
JPS6339977Y2 true JPS6339977Y2 (en]) | 1988-10-19 |
Family
ID=30373122
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP17099183U Granted JPS6079755U (ja) | 1983-11-04 | 1983-11-04 | 抵抗を有する半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6079755U (en]) |
-
1983
- 1983-11-04 JP JP17099183U patent/JPS6079755U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6079755U (ja) | 1985-06-03 |
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